Bulk Lithography: Synthesis and Analysis

Bulk Lithography: Synthesis and Analysis

LAP Lambert Academic Publishing ( 2015-02-26 )

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Bulk Lithography is micro-fabrication process for the development of three-dimensional polymer micro-structures using single scan of layer beam over unconstraint depth of photopolymer. Development of the free formed three-dimensional micro-structures without stair-stepping effect along the direction of propagation of light is the main feature of the process. Bulk Lithography has demonstrated capability to fabricate both Cartesian and Axi-symmetric micro-structures. Furthermore process also has demonstrated the fabrication of application oriented micro-structures such as micro-cantilever, micro-lens, fresnel lens and so on.

Book Details:

ISBN-13:

978-3-659-39447-8

ISBN-10:

3659394475

EAN:

9783659394478

Book language:

English

By (author) :

Kiran Bhole

Number of pages:

100

Published on:

2015-02-26

Category:

Mechanical engineering, manufacturing technology