To study the Modeling, Analysis and Design of MEMS Gyroscope

This book is a study of various MEMS Gyroscopes available in the world,their working principles/phenomenon and respective applications.It covers the various processes involved in the fabrication of MEMS gyroscopes.The book will help as a tutorial to model,simulate and thus analyse a MEMS Gyroscope using Coventorware 2010 MEMS+2(MEMS design tool). It will also elaborate the actual working principle of MEMS Gyroscopes used in the sensors, gadgets and instruments with intrinsic properties.