Microphotonics Waveguide Process Development

Silicon photonics is considered to be the next leap in the optoelectronics, telecommunications, and electronics industries. This technology has gained its tremendous attention and research interests due to its capability in compatible with existing CMOS fabrication process. The advances in the recent years have made it possible to commercialize many newly developed components and systems in the very near future. In engaging in this research, the establishment of fundamental building blocks is mandatory. The silicon-on-insulator (SOI) microphotonics waveguides are therefore designed and fabricated within a standard CMOS research context.